Special gas:silane, ammonia, nitrogen oxide, hydrogen chloride, hydrogen bromide, hydrogen selenide, boron trichloride, sulfur hexafluoride, methane tetrafluoro, ethane hexafluoride, perfluoropropane, nitrogen trifluoride, phosphorus trifluoride, silicon tetrafluoride, phosphorus pentafluoride, dichlorosilane, germane.
Mixed gas: mixture of hydrogen and nitrogen, mixture of rare gases, mixture of rare gases and oxygen, mixture of rare gases and nitrogen, mixture of carbon dioxide and oxygen, mixture of carbon dioxide and ethylene oxide, mixture of carbon monoxide and hydrogen.